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发明名称
PLANERIZING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0161458(B1)
申请公布日期
1999.02.01
申请号
KR19950042619
申请日期
1995.11.21
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JIN-HYUN
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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