| 摘要 |
A specimen positioning device is offered which can reduce the effects of external disturbing vibrations. The specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The first portion (22) has a specimen holding portion (23) capable of holding a specimen (S). The second portion (24) supports the first portion (22) via a resilient member (34). |
