发明名称 Method for etching non-conductive substrate surfaces
摘要 An etching composition for non-conductive substrates such as polyester, polyether, polyimide, polyurethane, epoxy resin, polysulfone, polyethersulfone, polyetherimide, and polyamide, comprising a halogenide and/or nitrate of a metal selected from the group consisting of Na, Mg, Al, Si, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Ca, Zn, and combinations thereof such as FeCl3, FeCl2, TiCl3, CaCl2, CuCl2, CrCl3, ZnCl2, MgCl2, MnCl2, and Cr(NO3)3; and a related method for etching.
申请公布号 US7578947(B2) 申请公布日期 2009.08.25
申请号 US20060554100 申请日期 2006.10.30
申请人 ENTHONE INC. 发明人 SCHILDMANN MARK PETER;PRINZ ULRICH;KOENIGSHOFEN ANDREAS
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
主权项
地址