发明名称 INSTRUMENT AND METHOD FOR MEASURING REFLECTIVITY FOR DETERMINING REFLECTIVITY IN SELECTED MEASURING PORTION OF SPECTRUM-DEPENDENT REFLECTIVE MEASURING OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a reflectivity measuring instrument and a method therefor reduced in a measuring time for a measuring object by stable and simple measuring constitution, capable of using a compact radiation source of low power compared with a cyclotron to characterize the measuring object in a manufacturing site or a using site, and suitable for mass-production. SOLUTION: A reflection element 3 with a spectral target reflection characteristic is arranged in a downstream of the radiation source 1 to modulate a measurement radiation beam 2 inside a radiation passage. The reflection element 3 orients the modulated radiation beam 4 to the measuring object 5. A receiver for receiving a radiation reflected by a selected measuring portion is constituted as an integrating measurement detector 8.
申请公布号 JP2002328103(A) 申请公布日期 2002.11.15
申请号 JP20020109332 申请日期 2002.04.11
申请人 AIXUV GMBH;JENOPTIK MIKROTECHNIK GMBH;CARL-ZEISS-STIFTUNG 发明人 LEBERT RAINER;HEIM ULF;ASCHKE LUTZ;JUSCHKIN LARISSA
分类号 G01N23/203;G01N21/55;(IPC1-7):G01N23/203 主分类号 G01N23/203
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