发明名称 |
INSTRUMENT AND METHOD FOR MEASURING REFLECTIVITY FOR DETERMINING REFLECTIVITY IN SELECTED MEASURING PORTION OF SPECTRUM-DEPENDENT REFLECTIVE MEASURING OBJECT |
摘要 |
PROBLEM TO BE SOLVED: To provide a reflectivity measuring instrument and a method therefor reduced in a measuring time for a measuring object by stable and simple measuring constitution, capable of using a compact radiation source of low power compared with a cyclotron to characterize the measuring object in a manufacturing site or a using site, and suitable for mass-production. SOLUTION: A reflection element 3 with a spectral target reflection characteristic is arranged in a downstream of the radiation source 1 to modulate a measurement radiation beam 2 inside a radiation passage. The reflection element 3 orients the modulated radiation beam 4 to the measuring object 5. A receiver for receiving a radiation reflected by a selected measuring portion is constituted as an integrating measurement detector 8.
|
申请公布号 |
JP2002328103(A) |
申请公布日期 |
2002.11.15 |
申请号 |
JP20020109332 |
申请日期 |
2002.04.11 |
申请人 |
AIXUV GMBH;JENOPTIK MIKROTECHNIK GMBH;CARL-ZEISS-STIFTUNG |
发明人 |
LEBERT RAINER;HEIM ULF;ASCHKE LUTZ;JUSCHKIN LARISSA |
分类号 |
G01N23/203;G01N21/55;(IPC1-7):G01N23/203 |
主分类号 |
G01N23/203 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|