| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analysis method for surface-coated microparticles capable of simply evaluating the film thickness and irregularity of a surface-coated film layer of a microparticle.SOLUTION: The X-ray analysis method for surface-coated microparticles includes processing of: applying an X-ray to a microparticle S with a coated film layer Sx including an element different from a parent phase Sy on the surface; measuring a first amperage Idependent on X-ray absorption by a first element A provided in the coated film layer Sx; measuring a second amperage Idependent on X-ray absorption by a second element B provided in the parent layer Sy; calculating a film thickness d of the coated film layer Sx from a magnitude of a change in the first amperage Irepresenting a change in an X-ray absorption amount near an X-ray absorption end of the first element A; and calculating at least one of a size of the irregularity of the coated film layer Sx and a coating rate from the magnitude of the change in the second amperage Irepresenting the change in an X-ray absorption amount near an X-ray absorption end of the second element B, and the film thickness d.SELECTED DRAWING: Figure 7 |
