| 摘要 |
PURPOSE:To inspect the characteristics of a photosensitive body in extremely small inspection area units by irradiating the surface of the photosensitive body with light whose diameter, wavelength, and quantity are set and detecting a current generated by the movement of its electrostatic charges. CONSTITUTION:Luminous flux 8' which is entered into an external light shield cover 25, i.e. light whose diameter, wavelength, and quantity are set is projected on the surface of the photosensitive body which is charged electrostatically in the dark place in the external light intercepting cover 25 by a mirror 14 which is set to a specific position and a prescribed angle by being driven by a galvanometer 16. The electrostatically charged photosensitive body surface irradiated with the light decreases in resistance value by reacting with the light and the photosensitive surface and a conductive cylindrical pipe 2 enter a nearly conductive state; and charges on the irradiated photosensitive body surface move through the conductive cylindrical pipe 2, a connection line 19 connected to this conductive cylindrical pipe 2, and further a current detection part 22 to cause the motion of electrons to the potential of a grounding point 18. Consequently, the motion of electrons, i.e. a current is detected by a current detection part 22 to know the characteristics of the photosensitive body to the luminous flux 8' for inspection.
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