| 摘要 |
PROBLEM TO BE SOLVED: To provide a quarts glass for transmitting light which scarcely degrades light transmittance by irradiating an eximer laser. SOLUTION: This synthetic quarts glass for transmitting light is characterized by the existing amount of unpaired electron corresponding an absorption of g=2.001±0.002 at room temperature for the measurement by ESR(electron spin resonance) being below 1×1014/cm3, and at a low temperature below 100 K, the existing amount of unpaired electron corresponding an absorption of g=2.005±0.006 being 5×1013 to 5×1014/cm3. |
