发明名称 POSITIONING DEVICE
摘要 <p>PURPOSE: To provide a positioning device which can obtain a position relation between a hold board and a surface plate without providing any other positioning means and is inexpensive and high in reliability. CONSTITUTION: The device, which is equipped with a moving means 6 for the translational motion and rotational movement of bodies and displacement quantity measuring means 8a and 8b, and 9a and 9b for measuring the displacement quantities of bodies on two different lines and positions the bodies by controlling the moving means according to the measurement results of the displacement quantity measuring means, is equipped with a position acquiring means which obtains the positions of the bodies according to the quantity of rotational movement and the quantity of displacement when the bodies are placed in the rotational movement.</p>
申请公布号 JPH08320728(A) 申请公布日期 1996.12.03
申请号 JP19950149788 申请日期 1995.05.25
申请人 CANON INC 发明人 OSANAI EIJI;TSUI KOTARO
分类号 G01B11/00;G05D3/00;H01L21/027;H01L21/68;(IPC1-7):G05D3/00 主分类号 G01B11/00
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