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发明名称
A METHOD FOR MANUFACTURING A TRENCH STACKED CAPACITOR WITH ROUND ETCHED
摘要
申请公布号
KR0151123(B1)
申请公布日期
1998.10.01
申请号
KR19890016748
申请日期
1989.11.18
申请人
LG SEMICONDUCTOR CO.,LTD
发明人
LEE, YOUNG-JONG;KIM, SUNG-CHOL;RA, SA-KYUN
分类号
H01L29/92;(IPC1-7):H01L29/92
主分类号
H01L29/92
代理机构
代理人
主权项
地址
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