| 摘要 |
PROBLEM TO BE SOLVED: To eliminate need for extending LT, thereby suppress increase in cost, simplify a manufacturing equipment, and prevent influence from dust generated by a human, by making a system in such a structure that it is able to conduct opening and closing operations and a transferring operation at the same time. SOLUTION: A semiconductor storing jig 1 for storing and carrying a carrier 2 mounted with semiconductor wafers 10 has a box-like cover section 6 having an open bottom face 16 so that it can cover the carrier 2 from above, window sections 8 which are opening sections formed in sidewalls of the cover section 6 and sealed by films deformable by external force, and lounge sections 7 projecting from the external surface of the sidewalls above the window sections 8. The carrier 2 on a table is covered airtightly by the box-like cover 6 which has such a structure as to cover the carrier 2 from the above, and small windows made of a material which is not deformed so as to be able to catch the carrier 2 inside. By means of a two-stage controllable transfer machine having claws 13, it is distinguished as to the cover and the carrier being held at the same time, or only the cover being held. |
