发明名称 MICROOPTOELECTROMECHANICAL SYSTEM (MOEMS) BASED LASER
摘要 A laser device includes a waveguide substrate having a plurality of folded waveguide paths, the folded waveguide paths having widths of no more than approximately 1 mm, the folded waveguide paths having a surface area to volume ratio of at least 4 mm<-1>. The laser can also include a re-entrant cavity adapted for surrounding the sides and bottom of the waveguide substrate and a plate layer having an electrode array formed from a plurality of conductive traces aligned with the waveguide paths. A method for forming a laser device includes the steps of providing a waveguide substrate and forming a folded waveguide structure from a plurality of intersecting folded waveguide paths in the waveguide substrate, the folded waveguide paths having widths of no more than 1 mm, the waveguide paths having a surface area to volume ratio of at least 4 mm<-1>.
申请公布号 WO02091529(A2) 申请公布日期 2002.11.14
申请号 WO2002US11240 申请日期 2002.04.09
申请人 UT-BATTELLE, LLC 发明人 HUTCHINSON, DONALD, P.
分类号 H01S3/063;H01S3/081;H01S3/23 主分类号 H01S3/063
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