| 摘要 |
Between an air source and a first pressure chamber of a double-acting main cylinder having a length measurement sensor for measuring an acting position of a piston, a supply solenoid valve is connected; between the first pressure chamber and the atmosphere, an exhaust solenoid valve is connected; and between a second pressure chamber and the air source, a stop solenoid valve is connected. When a target acting position of the piston is inputted into a controller, the controller moves the piston to the target acting position so that a position measured by the length measurement sensor agrees with the target position by on-off controlling the solenoid valves. Upon reaching the target position, the piston is stopped and held in the stopped state by confining air within the pressure chambers.
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