| 摘要 |
PROBLEM TO BE SOLVED: To provide a disassembling method of a substrate, an evaluation method of the substrate, and a substrate disassembling device capable of acquiring simply and efficiently disassembling liquid including a residue after disassembling of a silicon substrate, and performing highly-accurate impurity analysis. SOLUTION: The substrate 2 is disassembled by using the substrate disassembling device equipped with a substrate holding part 4 for holding the substrate 2, a solution storage part 1a for storing disassembling solution 3 for disassembling the substrate 2, a disassembling liquid recovery part 6 for recovering the disassembling liquid acquired by disassembling the substrate 2, a sealing system container 1 for sealing them, a solution heating mechanism 11 for heating and evaporating the disassembling solution 3, and a cooling mechanism 9 for cooling vapor 7 of the disassembling solution vaporized by the solution heating mechanism 11 to generate droplets. COPYRIGHT: (C)2009,JPO&INPIT
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