| 摘要 |
The present invention relates to a residual gas exhaust hood device for a chamber, to remove toxic gas remaining in a processing chamber to replace products manufactured in the processing chamber. According to the present invention, the device comprises: a main unit having multiple casters in a lower part; a horizontal moving unit moved towards one and the other side along a horizontal guide unit in an upper part of the main unit; a lifting/lowering unit installed inside the horizontal moving unit and lifted/lowered along a vertical guide unit through manipulation of a lifting/lowering manipulation means; an upper chamber cover unit to be withdrawn to one side through a withdrawing means in the lifting/lowering unit, covering an upper part of a processing chamber, and inputting external air into the processing chamber and exhausting the toxic gas remaining in the processing chamber to an exhaust pipe by opening of one or more opening/closing units; and an exhaust unit installed inside the main unit and connected to the exhaust pipe to forcibly suck the toxic gas. |
