发明名称 Method to test groups of electronic structural elements; involves using response output signal following input of test signal in integrated circuit to be tested with common test signal entered in electronic structural elements of group
摘要 A group of electronic structural elements (A1,A2) to be tested are evaluated as good or defective, based on a response signal of the structural element in its totality as good or defective. In a second test, each test object (A1,A2) of the group that is designated defective is supplied with an independent test signal, and is declared to be good or defective depending on the response signal of this structural element. An Independent claim is included for a device for implementing the method.
申请公布号 DE19939068(A1) 申请公布日期 2000.02.24
申请号 DE19991039068 申请日期 1999.08.18
申请人 ADVANTEST CORP., TOKIO/TOKYO 发明人 KOBAYASHI, YOSHIHITO
分类号 G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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