GUIDER FOR SEMICONDUCTOR WAFER

摘要

PURPOSE: A guider for a semiconductor wafer is provided to prevent damage to the semiconductor wafer by having the wafer not separated, and to easily perform a loading operation of the semiconductor wafer by easily fixing the position of the semiconductor wafer. CONSTITUTION: A guider for a semiconductor wafer comprises a body(201), a first rod(204), a second rod(206), a plurality of first slots and a plurality of second slots. The body has both side surfaces separated a predetermined distance from each other. The first rod(204) is connected to the side surface of the body and the second rod(206) is connected to the side surface of the body at both sides of the first rod(204). The plurality of first slots are established from the first rod(204) upward and are separated from each other in a direction of both side surfaces of the body while having a depth from 3.2 to 3.8 millimeter. Second slots are established from the second rod(206) upward so as to correspond to the first slots. In second slots, a bottom part is established at a predetermined angle to a horizontal direction.