MANUFACTURING METHOD OF PHOTOELECTRIC CONVERSION APPARATUS

摘要

A method of manufacturing a photoelectric conversion apparatus includes forming a switching element on one surface of a substrate, forming an interlayer insulation film so as to cover the switching element, forming a shading film on the interlayer insulation film in an area overlapping the switching element when seen from a film thickness direction of the substrate, forming a lower electrode on the interlayer insulation film, and forming a semiconductor film having a chalcopyrite structure on the lower electrode. A group 16 element is included in the semiconductor film, and in forming the semiconductor film, the shading film and the lower electrode are caused to react to the group 16 element to form a shading film including the group 16 element and a lower electrode including the group 16 element.

主权项

1. A method of manufacturing a photoelectric conversion apparatus, comprising:
forming a switching element on one surface of a substrate; forming an interlayer insulation film so as to cover the switching element; forming a shading film on the interlayer insulation film in an area overlapping the switching element when seen from a film thickness direction of the substrate; forming a lower electrode on the interlayer insulation film; and forming a semiconductor film having a chalcopyrite structure on the lower electrode, wherein a group 16 element is included in the semiconductor film, and in forming the semiconductor film, the shading film and the lower electrode are caused to react to the group 16 element to form a shading film including the group 16 element and a lower electrode including the group 16 element.