发明名称 Metod och överföring av ett mönster till ett substrat
摘要 The method involves utilizing a stamp (4) having a similar coefficient of thermal expansion as that of a substrate (1) e.g. aluminum. The stamp and the substrate are heated to a temperature at which a moldable film (2) becomes soft before pressing the stamp against the film. The stamp and the substrate are cooled at a temperature at which the film becomes hard, and the stamp is removed from the substrate. An Independent claim is also included for a stamp for transferring a pattern provided on stamp to a substrate.
申请公布号 SE0202116(L) 申请公布日期 2004.01.09
申请号 SE20020002116 申请日期 2002.07.08
申请人 OBDUCAT AB 发明人 OLSSON LENNART
分类号 G03F;G03F7/00;(IPC1-7):G03F7/00 主分类号 G03F
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