| 摘要 |
PROBLEM TO BE SOLVED: To improve oxidation resistance and lubricity of a diamond film. SOLUTION: Since boron is doped in a boron-doped diamond film 20 at the rate of 0.5-1.0 atom%, a layer of an oxide of boron (for example, B<SB>2</SB>O<SB>3</SB>) is deposited on the surface of the diamond film 20 when being oxidized, the progress of oxidation into the film is suppressed by the layer of the oxide, the oxidation resistance of the film 20 is improved, the friction coefficient is reduced and the lubricity is improved. Early wear or peeling of the film caused by the oxidation is suppressed and excellent durability can be obtained even when cutting a composite material containing an iron material or cutting a heat-resistant alloy such as a titanium alloy with the cutting point being hot. Further, since the lubricity is also improved, heat generation caused by the friction is suppressed, the durability of the film 20 is improved in this aspect, and the quality of a worked surface of a work is improved. COPYRIGHT: (C)2006,JPO&NCIPI
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