SUBSTRATE MANUFACTURING APPARATUS COMPRISING GAS BARRIER

摘要

A substrate manufacturing apparatus is provided to prevent the oxidation of an inner member and a substrate and to restrain the inflow of contaminants by using a gas barrier generating unit. A substrate manufacturing apparatus includes a chamber(110) for processing a substrate, a substrate gate, a housing, and a gas barrier generating unit. The substrate gate(119) is installed at a side of the chamber in order to open and close the chamber. The housing is installed at an outer wall of the chamber. The housing includes a path connected through the substrate gate. The gas barrier generating unit generates a gas barrier in the housing.