Array-type light-receiving device

摘要

An array-type light-receiving device includes a substrate including a main surface, a rear surface, and a plurality of recesses formed in the rear surface, the rear surface including an incident plane on which incident light is received; a stacked semiconductor layer disposed on the main surface of the substrate, the stacked semiconductor layer including a light-receiving layer; and a plurality of pixel regions each of which includes the light-receiving layer. The plurality of recesses are each depressed from the rear surface in a thickness direction of the substrate. In addition, each of the plurality of recesses has a bottom surface and a side surface, the bottom surface facing at least one of the plurality of pixel regions, the side surface including a tapered region inclined at a predetermined inclination angle with respect to an in-plane direction of the main surface.

主权项

1. An array-type tight-receiving device comprising:
a substrate including a main surface, a rear surface, and a plurality of recesses formed in the rear surface, the rear surface including an incident plane on which incident light is received; a stacked semiconductor layer disposed on the main surface of the substrate, the stacked semiconductor layer including a light-receiving layer; and a plurality of pixel regions each of which includes the light-receiving layer and corresponds to one of the recesses, wherein the recesses are each depressed from the rear surface in a thickness direction of the substrate, each of the recesses has a bottom surface and a side surface, the bottom surface facing at least its corresponding pixel region, the side surface including a tapered region inclined at a predetermined inclination angle with respect to an in-plane direction of the main surface, each of the pixel regions includes a light-receiving plane in the light-receiving layer, the light-receiving plane of each pixel region extending along the main surface of the substrate, the bottom surface of each recess faces the light-receiving plane of its corresponding pixel region, and the inclination angle satisfies the relational expression: 90°≧θ≧45° and (L2−L1)/(2×L3)≧tan(2θ)≧−(L1+L2)/(2×L3), where θ represents the inclination angle, L1 represents a pitch at which the recesses are arranged, L2 represents a diameter of the light-receiving lane of each pixel region, and L3 represents a distance from the rear surface to the light-receiving plane of each pixel region.