| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reaction sintered silicon nitride-based composite prepared by using silicon as a main raw material, which is less expensive than silicon nitride, and utilizing the process of nitriding silicon. <P>SOLUTION: The silicon nitride-based composite is prepared by using a raw material containing silicon, subjecting the raw material to reaction sintering under a nitrogen atmosphere for nitriding the silicon, and then densifying the resulting silicon nitride. The silicon nitride-based composite contains oxide and/or nitride of Zr in a dispersed state and has an amorphous phase of oxide or oxynitride which contains at least Al and Si as a grain boundary phase. Its production process is disclosed. Also provided is a method for producing a silicon nitride-based composite containing a β-sialon-based ceramic which comprises using a raw material containing silicon as a starting raw material, mixing zirconium oxide and a sintering aid in a predetermined formulation, molding the resulting mixture, subjecting the resulting molded product to reaction sintering under a nitrogen atmosphere for nitriding the silicon, and then raising the temperature of the resulting silicon nitride to densify the same. The present invention can provide a silicon nitride-based composite which is excellent in reliability and can be produced at a low cost. <P>COPYRIGHT: (C)2008,JPO&INPIT |
