MEMS ELECTROSTATIC ACTUATOR DEVICE FOR RF VARACTOR APPLICATIONS

摘要

A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.

主权项

1. A microelectromechanical system (MEMS) electrostatic actuator device, comprising:
at least one array of actuator elements, wherein each actuator element comprises:
a bottom plate having a first electrode for a first RF signal line and a second electrode for a second RF signal line;a pedestal;a top electrode connected to the pedestal, the top electrode having a center membrane portion that extends over the first RF signal line and the second RF signal line; anda pair of cantilever hinges connected between the top electrode and an anchor on opposite ends of the center membrane portion, the pair of cantilever hinges allowing for movement of the center membrane portion closer to and further from the bottom plate.