发明名称 PRODUCTION OF ARRAY SUBSTRATE
摘要 <p>PURPOSE:To prevent the warpage of an insulating substrate by the effect of heat and to produce the array substrate with high accuracy by forming the substrate in such a manner that the first wirings of one array element extend in the direction intersecting with the first wirings of another array element. CONSTITUTION:The address wirings are so formed that the address wirings 21 of the array elements A, C, D, F extend in the direction orthogonal with the address wirings 21 of the array elements B, E at the time of patterning and forming 6 pieces of the array elements on the insulating substrate 10. The stresses generated in the insulating substrate 10 disperse in a direction X and a direction Y and the warpage of the insulating substrate is prevented even if the address wirings are shrunk by the heat treatment after the formation of the address wirings. Then, the array substrate for the liquid crystal display device is produced with high accuracy without degrading the positioning accuracy in a photolithography stage and generating troubles in a transporting stage.</p>
申请公布号 JPH0682819(A) 申请公布日期 1994.03.25
申请号 JP19920232470 申请日期 1992.08.31
申请人 TOSHIBA CORP 发明人 HIRAHARA HARUAKI;DOJIRO MASAYUKI
分类号 G02F1/13;G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;G02F1/134;H01L29/784 主分类号 G02F1/13
代理机构 代理人
主权项
地址