发明名称 SEALING MECHANISM, DRIVE UNIT OF SEALING MECHANISM, CONVEYANCE DEVICE, AND MANUFACTURING DEVICE
摘要 A sealing mechanism functioning as a separator between two spaces having different pressures includes: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface.
申请公布号 US2016300742(A1) 申请公布日期 2016.10.13
申请号 US201415100406 申请日期 2014.12.10
申请人 NSK LTD. 发明人 HIGUCHI Hideya;NAKAMURA Tsuyoshi;KON Hideki
分类号 H01L21/67;H01L21/673;H01L21/687 主分类号 H01L21/67
代理机构 代理人
主权项 1. A sealing mechanism functioning as a separator between two spaces having different pressures, comprising: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface.
地址 Tokyo JP