发明名称 |
SEALING MECHANISM, DRIVE UNIT OF SEALING MECHANISM, CONVEYANCE DEVICE, AND MANUFACTURING DEVICE |
摘要 |
A sealing mechanism functioning as a separator between two spaces having different pressures includes: a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface. |
申请公布号 |
US2016300742(A1) |
申请公布日期 |
2016.10.13 |
申请号 |
US201415100406 |
申请日期 |
2014.12.10 |
申请人 |
NSK LTD. |
发明人 |
HIGUCHI Hideya;NAKAMURA Tsuyoshi;KON Hideki |
分类号 |
H01L21/67;H01L21/673;H01L21/687 |
主分类号 |
H01L21/67 |
代理机构 |
|
代理人 |
|
主权项 |
1. A sealing mechanism functioning as a separator between two spaces having different pressures, comprising:
a housing; a shaft inserted into the housing; an annular sealing member sealing a gap by contacting a radial outer surface of the shaft or a radial outer surface of a rotary portion fixed to the shaft; and a lubricant groove storing a lubricant to be supplied between the annular sealing member and the radial outer surface. |
地址 |
Tokyo JP |