| 摘要 |
The device for processing a workpiece using a deflectable laser beam, comprises a laser beam source (1) for emitting a laser beam (2), a controllable deflection unit (5) that is designed to deflect the emitted laser beam in x-y direction, a focusing lens (6), and a controllable, deformable mirror (3) for focus position correction. The focusing lens is arranged downstream to the deflection unit in a laser beam direction and the deflection unit has a deflecting mirror, which is fixedly connected with the focusing lens over a rigid connecting link. The device for processing a workpiece using a deflectable laser beam, comprises a laser beam source (1) for emitting a laser beam (2), a controllable deflection unit (5) that is designed to deflect the emitted laser beam in x-y direction, a focusing lens (6), and a controllable, deformable mirror (3) for focus position correction. The focusing lens is arranged downstream to the deflection unit in a laser beam direction and the deflection unit has a deflecting mirror, which is fixedly connected with the focusing lens over a rigid connecting link. A nozzle is present in the laser beam direction behind the focusing lens and is fixedly arranged to the focusing lens. The deflection mirror is mounted in a cardanic suspension and is connected with two rotary drives. The deflection mirror is connected with three linear drives over a three-point support. A tilted mirror is present between the deformable mirror and the deflecting mirror and is tiltable around an axis. The laser beam source and the deformable mirror are rigidly arranged to each other or are mounted onto a multi-joint robot arm, in which the laser beam is guided over tilted mirror arranged in the joints and the deflection unit presents itself at the free ends of the robot arm. |
