发明名称 Laser processing method
摘要 A laser processing method for forming a laser groove along dividing lines by applying a pulse laser beam along the dividing lines formed on a workpiece, the method comprising the steps of forming the focusing spot of the pulse laser beam in a shape of oval, positioning the long axis of the oval focusing spot along each of the dividing lines, and moving the focusing spot and the workpiece along the dividing line relative to each other.
申请公布号 US2006035411(A1) 申请公布日期 2006.02.16
申请号 US20050200142 申请日期 2005.08.10
申请人 DISCO CORPORATION 发明人 OBA RYUGO;FURUTA KENJI;HOSHINO HITOSHI;KITAHARA NOBUYASU;TAKEDA NOBORU
分类号 H01L21/50 主分类号 H01L21/50
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