发明名称 |
LOW DIELECTRIC CONSTANT FILMS WITH HIGH GLASS TRANSITION TEMPERATURES MADE BY ELECTRON BEAM CURING |
摘要 |
Production of a dielectric coating on a substrate whereby a poly(arylene ethers) or fluorinated poly(arylene ethers) layer is cured by exposure to electron beam radiation. A wide area electron beam is used which causes chemical reactions to occur in the polymer structure which are thought to cause cross-links between polymer chains. The cross-links lead to higher mechanical strength and higher glass transition temperature, lower thermal expansion coefficient, greater thermal-chemical stability and greater resistance to aggressive organic solvents. The polymer layer may also be optionally heated, thermally annealed, and/or exposed to UV actinic light.
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申请公布号 |
WO9943025(A1) |
申请公布日期 |
1999.08.26 |
申请号 |
WO1999US03997 |
申请日期 |
1999.02.24 |
申请人 |
ALLIEDSIGNAL, INC. |
发明人 |
DRAGE, JAMES;YANG, JIUNGJUN;CHOI, DONG, KYU |
分类号 |
C08G85/00;B05D3/02;B05D3/06;H01L21/312;(IPC1-7):H01L21/312 |
主分类号 |
C08G85/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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