发明名称 ELECTROSTATIC HEATING SUBSTRATE HOLDER WHICH IS POLARISED AT HIGH VOLTAGE
摘要 The present invention relates to a bracket comprising an electrically conductive polarised table (10) which is connected to a high-voltage power supply (12) supported by an electrically insulating base (40), an electrically insulating substrate holder (20) which is cylindrical, the upper face thereof having a support plane for receiving a substrate (50), feet (15) which rest on the polarised table (10) in order to support the lower face of the substrate holder (20), at least one electrically conductive connection (201, 202, 203, 31, 30) for connecting the support plane to the polarised table (10). The bracket is characterized in that the substrate holder (20) incorporates a heating resistor (26).
申请公布号 EP3103137(A1) 申请公布日期 2016.12.14
申请号 EP20150713195 申请日期 2015.02.04
申请人 Ion Beam Services 发明人 TORREGROSA, Frank;ROUX, Laurent
分类号 H01L21/683 主分类号 H01L21/683
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