MICROMACHINE SWITCH AND ITS PRODUCTION METHOD

摘要

A micromachine which can be mass-produced, is cheap, and has high performance. The machine comprises a support member (7) provided near a gap of a signal line on a base (1) and has a predetermined height from the surface of the base (1), a flexible beam member (cantilevered arm (8)) which projects from the support member (7) generally parallel to the surface of the base (1) and part of which faces to the gap, a contact electrode (5) provided on the base side of the beam member and facing to at least the gap, and a lower electrode (4) provided on the base (1) and facing to part of the beam member. The beam member is conductive from the portion connected to the support member (7) to the portion facing to the lower electrode (4) and consequently functions as an upper electrode (9). The thermal expansion coefficient is generally symmetric in the direction of the thickness perpendicular to the surface of the base (1) at least in the region from the portion connected to the support member (7) to the portion facing to the lower electrode (4).