| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acid-degradable resin imparting good properties to a resist composition and having an alicyclic group, and a method for producing the acid-degradable resin; and to provide the positive-type resist composition having excellent properties of having a wide process window and a small dependency on the pattern density by using the acid-degradable resin. <P>SOLUTION: The method for producing the acid-degradable resin having the alicyclic group involves a step for precipitating a solid resin by bringing a reaction solution containing the acid-degradable resin having the alicyclic group and obtained by a radical polymerization reaction into contact with a solvent in which the resin is slightly soluble or insoluble in an amount of <5 times as much as that of the reaction solution by volume. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
