| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection tool capable of surely connecting a semiconductor device which is an object to be inspected, to a semiconductor inspecting apparatus electrically. SOLUTION: The semiconductor inspection tool includes: a first plane (37a, 37b, 37c, 37d, 41a and 43a) being in contact with a first region (21a, 21b, 21c and 21d) of a socket side (21) of a load board (2); and a load adjusting structure (38, 40) capable of adjusting a first load which is applied to the first region by the first plane. The load board includes: a socket (27) disposed on the socket side; and a test head side (22) disposed on the side opposite to the socket side. The semiconductor device (6) is mounted on the socket. A contact point (24) which is connected electrically to the semiconductor device, is disposed on the test head side. A pogo pin (52a) with which a test head (5) of the semiconductor inspecting apparatus for inspecting the semiconductor device is equipped, is configured so as to contact with the contact point. COPYRIGHT: (C)2008,JPO&INPIT
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