Field-effect device and manufacturing method thereof

摘要

Embodiments relate to a field-effect device that includes a body region, a first source/drain region of a first conductivity type, a second source/drain region, and a pocket implant region adjacent to the first source/drain region, the pocket implant region being of a second conductivity type, wherein the second conductivity type is different from the first conductivity type. The body region physically contacts the pocket implant region.

主权项

1. A method for manufacturing a field-effect device, the method comprising:
forming a body region of a second conductivity type; forming a well region in the body region; forming a first source/drain region of a first conductivity type; forming a second source/drain region in the well region, the second source/drain region being of the first conductivity type or of the second conductivity type; forming a doped region of the first conductivity type disposed laterally adjacent to the first source/drain region, a doping concentration level in the doped region being lower than a doping concentration level of the first source/drain region; and forming a pocket implant region adjacent to the first source/drain region, the pocket implant region being of the second conductivity type, wherein the pocket implant region comprises a first subregion adjacent to the first source/drain region and a second subregion adjacent to the first subregion and between the first subregion and the body region, a doping concentration level in the first subregion of the pocket implant region being higher than a doping concentration level of the well region and being higher than a doping concentration level of the body region, and further being higher than the doping concentration level in the doped region, and a doping concentration level in the second subregion of the pocket implant region being lower than the doping concentration level of the first subregion and being higher than the doping concentration level of the body region, wherein the pocket implant region is formed such that the body region physically contacts the pocket implant region.