Top-coat compositions with norbornene-type polymers and immersion lithographic processes using such compositions

摘要

A top-coat composition comprising a non-self imageable polymer consisting of norbornene-type repeating units, said polymer comprising a first norbornene-type repeating unit represented by Formula I:
where X is -CH 2 -, -CH 2 CH 2 -, O or S; n is an integer from 0 to 5 inclusive; each of R 1 to R 4 independently represents hydrogen, a linear or branched alkyl group, or a linear or branched haloalkyl group, subject to the proviso that at least one of R 1 to R 4 is a -QNHSO 2 R 5 group where Q is a linear or branched alkyl spacer of 1 to 5 carbons, and R 5 is a perhalo group of 1 to 10 carbon atoms, a solvent and optionally comprising one or more of a crosslinking agent, an acidic material or a surfactant.