| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect a foreign matter or a defective.SOLUTION: In the case that inspection is performed using two backgrounds of different system colors as two backgrounds of different optical characteristics, even a pixel obtained by imaging a foreign matter that is determined to be a pixel obtained by imaging a background material when one background is used is determined as a pixel obtained by imaging an inspection object when the other background is used. Therefore, regarding the pixel obtained by imaging the inspection object, whether the object is a nondefective or not can be certainly inspected. Therefore, a foreign matter or a defective can be more accurately detected than the conventional art.SELECTED DRAWING: Figure 3 |
