METHOD OF MANUFACTURING SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method capable of easily manufacturing a solar battery having an excellent photoelectric conversion efficiency at low cost.SOLUTION: A method of manufacturing a solar battery comprises: a first step of coating paste containing an impurity element on a part of one surface side of a semiconductor substrate; a second step of subjecting the semiconductor substrate to a first thermal treatment under an atmosphere of gas containing no impurity element in a treatment chamber so that a first impurity diffusion layer in which the impurity element of a first concentration is diffused in a lower area of the paste is formed in the lower area of the paste; and a third step of subjecting the semiconductor substrate to a second thermal treatment under an atmosphere of dopant-contained gas containing the impurity element in the treatment chamber under a diffusion condition of the impurity element which is different from the first thermal treatment subsequently to the first thermal treatment while supporting the semiconductor substrate in the treatment chamber so that a second impurity diffusion layer in which the impurity element having a second concentration lower than the first concentration is diffused in an exposed area uncoated with the paste on the one surface side of the semiconductor substrate is formed in the exposed area.SELECTED DRAWING: Figure 2