| 摘要 |
A stage control apparatus for controlling a motion of a stage. The apparatus includes a filter unit which eliminates a resonance frequency component contained in an input signal and outputs a control signal for controlling a motion of the stage, a generating unit which generates a frequency spectrum of a motion signal concerning a motion of the stage, a calculating unit which calculates coefficients of the filter unit based on the frequency spectrum, and a setting unit which sets the coefficients calculated by the calculation unit as the coefficients of the filter unit.
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