发明名称 MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a structure capable of accurately measuring even for a narrow inspected surface, in a measuring instrument for measuring the angle of inclination, flatness, surface roughness, etc., of the inspected surface based on light reflected from the inspected surface. SOLUTION: In this measuring instrument 1, a condensing optical system 3 comprising first and second condensing lenses 31 and 32 is disposed in an optical path extending from a light source 2 to a collimator lens 6. The light outgoing from the light source 2 is converged by the optical system 3 to a size smaller than the effective diameter of the lens 6, then enters the lens 6 to be turned into parallel light by the lens 6, and is projected onto the inspected surface 71 or 72. Since the diameter of the parallel light beam projected onto the inspected surface 71 or 72 is small, even if the surface 72 is narrow, the part except the surface 72 is not irradiated with light.
申请公布号 JP2001324314(A) 申请公布日期 2001.11.22
申请号 JP20000139554 申请日期 2000.05.12
申请人 SANKYO SEIKI MFG CO LTD 发明人 FURUHATA HIROAKI;KONDO HIDEYUKI;HARADA ISAMU
分类号 G01B11/26;G01B11/30;(IPC1-7):G01B11/26 主分类号 G01B11/26
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