Laser processing machine

摘要

A laser processing machine for processing workpieces includes a beam guide containing a gas atmosphere, and also includes an apparatus for investigating the gas atmosphere in the beam guide for impurities. The investigation apparatus makes use of the photoacoustic effect. The measuring apparatus has a measuring chamber and at least one measuring head, where the beam guide acts as the measuring chamber. As a measuring chamber, the beam guide contains the gas atmosphere that is to be investigated and also a modulated laser beam modulated. The measuring head(s) are integrated into the beam guide and are used to detect the photoacoustic effect in the measuring chamber.

主权项

1. A laser processing machine for processing workpieces, the laser processing machine comprising: a laser generator configured to generate a laser beam and to modulate the power the laser beam for producing a photoacoustic effect; a laser processing head configured to focus the laser beam that has been generated and power modulated by the laser generator; and an investigation system for investigating a gas atmosphere in a measuring chamber for impurities based on the photoacoustic effect, the investigation system comprising the measuring chamber, a photoacoustic sensor system, and a control and evaluation unit, wherein the control and evaluation unit is connected to the laser generator and is operable to modulate an output of the laser generator such that the laser generator modulates the power of the laser beam for producing the photoacoustic effect, the measuring chamber is arranged between the laser generator and a laser beam focusing device inside the laser processing head, the measuring chamber being configured to contain a gas atmosphere and to guide the power modulated laser beam on a laser beam path from the laser generator to the laser processing head; the photoacoustic sensor system is configured to analyze the gas atmosphere in the measuring chamber for impurities based on the photoacoustic effect responsive to the power modulated laser beam, the photoacoustic sensor system comprising at least one measuring head built into the measuring chamber or arranged in a window of the measuring chamber and configured to detect the photoacoustic effect in the measuring chamber, wherein the measuring chamber comprises the at least one measuring head.