Methods for forming stacked capacitors with fuse protection

摘要

An embodiment is a circuit. The circuit includes active circuitry, a first capacitor, a first fuse, a second capacitor, and a second fuse. The active circuitry has a first power node and a second power node. The first capacitor is coupled to the first fuse serially to form a first segment. The second capacitor is coupled to the second fuse serially to form a second segment. The first segment and the second segment are coupled together in parallel and between the first power node and the second power node.

主权项

1. A method comprising:
providing a circuit comprising active circuitry coupled in parallel with a capacitor bank between a first power rail and a second power rail, the capacitor bank comprising multiple segments, each of the multiple segments comprising a fuse serially coupled to a capacitor by a conductive line having a horizontal portion, a first segment of the multiple segments comprising a first fuse in a first dielectric layer and a first capacitor in a second dielectric layer, wherein a top surface of the second dielectric layer is coplanar with a top surface of a horizontal portion of a first conductive line serially coupling the first fuse to the first capacitor, a second segment of the multiple segments comprising a second fuse in a third dielectric layer and a second capacitor in a fourth dielectric layer, wherein a top surface of the fourth dielectric layer is coplanar with a top surface of a horizontal portion of a second conductive line serially coupling the second fuse to the second capacitor, the second dielectric over the first dielectric layer, the third dielectric layer being over the second dielectric layer, the fourth dielectric layer being over the third dielectric layer, an upper electrode of the first capacitor being coupled to an upper electrode of the second capacitor using a conductive via; and blowing the fuse of at least one of the multiple segments.