EVAPORATION APPARATUS FOR MANUFACTURING DISPLAY DEVICE, MANUFACTURING APPARATUS FOR DISPLAY DEVICE HAVING THE SAME AND MANUFACTURING METHOD OF DISPLAY DEVICE USING THE SAME

摘要

An evaporation apparatus for manufacturing a display device and a method of manufacturing the display device are provided to prevent an evaporation material from overflowing by using an overflow preventing bump. An evaporation apparatus for manufacturing a display device includes an outer furnace(321), an inner furnace(323), and a heating source(325). The outer furnace is made of an inorganic material. The inner furnace is arranged inside the inner furnace and made of a metal. The heating source heats the outer furnace. The outer furnace is made of an inorganic material containing boron nitride or an aluminum oxide. The inner furnace is made of a metal containing at least one of molybdenum, tungsten, and titanium. An overflow preventing bump is formed along opening portions of the inner furnace and covers a part of opening portions.