| 发明名称 |
ULTRASONIC SENSOR AND MANUFACTURING METHOD FOR THE SAME |
| 摘要 |
An ultrasonic sensor includes: when two orthogonal axes are referred to as an X axis and a Y axis and a plane formed by the X axis and the Y axis is referred to as an XY plane, a substrate disposed across the XY plane; a plurality of spaces formed in the substrate in at least one direction of an X-axis direction and a Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are closed and that has a first surface on the substrate side and a second surface facing the first surface; and a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space, and that transmits/receives an ultrasonic wave. At least some of the spaces are arranged to form a zigzag shape. |
| 申请公布号 |
US2016284973(A1) |
申请公布日期 |
2016.09.29 |
| 申请号 |
US201615078098 |
申请日期 |
2016.03.23 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
OHASHI Koji |
| 分类号 |
H01L41/113;H01L41/25;B06B1/06 |
主分类号 |
H01L41/113 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An ultrasonic sensor comprising:
when two orthogonal axes are referred to as an X axis and a Y axis, and a plane formed by the X axis and the Y axis is referred to as an XY plane, a substrate disposed across the XY plane; a plurality of spaces formed in the substrate in at least one direction of the X-axis direction and the Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are enclosed and that has a first surface on the substrate side and a second surface facing the first surface; and a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space, and that transmits/receives an ultrasonic wave, wherein at least some of the spaces are arranged to form a zigzag shape. |
| 地址 |
Tokyo JP |
