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发明名称
Lackzusammensetzung und -anwendung.
摘要
申请公布号
DE3750275(T3)
申请公布日期
1998.10.01
申请号
DE19873750275T
申请日期
1987.06.03
申请人
MICROSI, INC. (N.D.GES.D.STAATES DELAWARE), PHOENIX, ARIZ., US
发明人
CRIVELLO, JAMES VINCENT, CLIFTON PARK NEW YORK 12065, US;O'BRIEN, MICHAEL JOSEPH, ALBANY NEW YORK 12203, US;LEE, JULIA LAM, SCHENECTADY NEW YORK 12309, US
分类号
G03C1/72;G03C1/00;G03C1/73;G03F7/004;G03F7/029;G03F7/039;G03F7/095;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G03F7/004
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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