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发明名称
PATTERN INSPECTION APPARATUS
摘要
申请公布号
JPH11101752(A)
申请公布日期
1999.04.13
申请号
JP19970260515
申请日期
1997.09.25
申请人
NEC ENG LTD
发明人
SHIMADA KAZUYUKI
分类号
G01N21/88;G01N21/956;G06T1/00;G06T7/00;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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