| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device analyzing at high S/N ratio and a sufficient measurement strength using soft X ray, namely, being capable of providing a sufficiently highly precise analysis in the X-ray fluorescence analyzer, having an optical system of a fixed goniometer. SOLUTION: This X-ray fluorescence analyzer is provided with a Soller slit 5 for letting a fluorescence X-ray 4 from a sample 1 to pass there-through, a spectral diffraction element 7 diffracting a fluorescence X-ray 6 passing through the Soller slit 5 with a parabolic cylinder surface fixed to the Soller slit 5 set to a diffraction surface 7a and condensing a soft X-rays 8 into a focus on the parabolic cylinder surface 7a, a slit 9 having a slit hole 9a at a position of the focus, and a detector 11 measuring the strength of the soft X ray 10 passing through the slit hole 9a.</p> |
