发明名称 Method for forming a multi-frequency surface acoustic wave device
摘要 Provided is a method of manufacturing a multi-frequency surface acoustic wave (SAW) device on a common piezoelectric substrate. The method features varying the resonant frequency of waveguide elements of the SAW device using a single etch step. The etch step removes a sub-portion of multiple layers of conductive film disposed on the substrate.
申请公布号 US7299528(B2) 申请公布日期 2007.11.27
申请号 US20020288529 申请日期 2002.11.05
申请人 LEE DAVID M;LINDARS PAUL;JONES CHRISTOPHER ELLIS;FLOWERS JAMES E;GOETZ MARTIN P 发明人 LEE DAVID M.;LINDARS PAUL;JONES CHRISTOPHER ELLIS;FLOWERS JAMES E.;GOETZ MARTIN P.
分类号 H04R17/00;H01L41/00;H03H3/08;H03H9/145;H05K3/04 主分类号 H04R17/00
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