PIEZOELECTRIC VIBRATOR AND PIEZOELECTRIC VIBRATION DEVICE

摘要

A piezoelectric vibrator that includes first and second vibration portions that vibrate with mutually reverse phases. Each of the vibration portions includes a silicon layer, a first piezoelectric layer and a second piezoelectric layer that has polarization in an opposite direction to a direction of polarization of the first piezoelectric layer. First and second electrodes are disposed on opposite sides of the second piezoelectric layer. The piezoelectric vibrator has a structure such that a first potential is applied to the first electrode of the first vibration portion and the second electrode of the second vibration portion, and a second potential is applied to the second electrode of the first vibration portion and the first electrode of the second vibration portion.

主权项

1. A piezoelectric vibrator comprising:
a first vibration member; and a second vibration member that vibrates with a mutually reverse phase to the first vibration member, wherein each of the first and second vibration members includes:
a silicon layer,a first piezoelectric layer disposed above the silicon layer,a first electrode disposed on the first piezoelectric layer on a side opposite the silicon layer,a second piezoelectric layer disposed on the first electrode on a side opposite the first piezoelectric layer and having polarization in an opposite direction to a direction of polarization of the first piezoelectric layer, anda second electrode disposed on the second piezoelectric layer on a side opposite the first electrode, wherein the first electrode of the first vibration member and the second electrode of the second vibration member are electrically connected to each other such that a first potential can be applied thereto, and wherein the second electrode of the first vibration member and the first electrode of the second vibration member are electrically connected to each other such that a second potential can be applied thereto.