A method and apparatus for diagnosing faults. A fault is detected. One or more process variables that contributed to the fault are determined. A relative contribution of each of the one or more process variables is determined. A determination is made as to which fault signatures match the fault, a match occurring when the relative contributions of the one or more process variables are within relative contribution ranges of the matching fault signature. Each fault signature is associated with at least one fault class.
申请公布号
WO2007133543(A3)
申请公布日期
2008.09.12
申请号
WO2007US11106
申请日期
2007.05.07
申请人
APPLIED MATERIALS, INC.;HARVEY, JR., LYNN, JERRY;SCHWARM, ALEXANDER, T.