发明名称 RANGED FAULT SIGNATURES FOR FAULT DIAGNOSIS
摘要 A method and apparatus for diagnosing faults. A fault is detected. One or more process variables that contributed to the fault are determined. A relative contribution of each of the one or more process variables is determined. A determination is made as to which fault signatures match the fault, a match occurring when the relative contributions of the one or more process variables are within relative contribution ranges of the matching fault signature. Each fault signature is associated with at least one fault class.
申请公布号 WO2007133543(A3) 申请公布日期 2008.09.12
申请号 WO2007US11106 申请日期 2007.05.07
申请人 APPLIED MATERIALS, INC.;HARVEY, JR., LYNN, JERRY;SCHWARM, ALEXANDER, T. 发明人 HARVEY, JR., LYNN, JERRY;SCHWARM, ALEXANDER, T.
分类号 G06F11/00 主分类号 G06F11/00
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