| 摘要 |
PROBLEM TO BE SOLVED: To especially simplify a mechanism of a stage 15 that is arranged in a vacuum chamber and scans by relatively moving a sample to an electronic beam, whereby it is microminiaturized.SOLUTION: A stage 15 arranged in a vacuum chamber 14, comprises: an X-axis stage 42; a Y-axis stage 43; a Z-axis stage 44, a θ-axis stage 45, and the stage of each axis is driven by an X-axis ultrasonic motor 54, a Y-axis ultrasonic motor 56, a Z-axis ultrasonic motor 62, a θ-axis ultrasonic motor 68 corresponded each other by a direct driving. Ultrasonic motors 54, 56, 62, and 68 of each axis generate an output of a moving direction of corresponding movable plate, and directly transmit such an output to the movable plate.SELECTED DRAWING: Figure 3 |
