发明名称 |
Structure and method for determining isolation of integrated circuit elements |
摘要 |
A wafer substrate test structure and method provides a novel means for quantitatively determining electrical isolation between active devices and passive elements in a monolithic integrated circuit. The structure and method of this invention are useful for both optimal design and manufacture of integrated circuit devices.
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申请公布号 |
US5254941(A) |
申请公布日期 |
1993.10.19 |
申请号 |
US19910784259 |
申请日期 |
1991.10.29 |
申请人 |
SGS-THOMSON MICROELECTRONICS, INC. |
发明人 |
OSIKA, DAVID M. |
分类号 |
G01R31/28;H01L23/544;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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